Hybrid Bonder
TFC-6700 / TFC-6800
Supports Chip-to-Wafer (C2W) Hybrid & Fusion Processing
An ultra-high accuracy bonder apply for C2W hybrid and fusion processes.
In the fields of GPUs, HBM, and image sensors used in servers and generative AI, the need for bumpless bonding is increasing when the microbump size reach to its limitation.
Additionally, the expectation on the chiplet architecture which combining different kinds of chips into a single package also attracts interest in C2W hybrid bonder.
Shibaura Mechatronics started working on the hybrid processes in the early stage and released the bonder to the market since 2016.
We have high technical capabilities and a wealth of experience and our bonder has been adopted by major manufacturing foundries.
TFC-6700 and TFC-6800 contribute to customers from development to production with "ultra-high accuracy", "high level cleanliness", and "extensive experience and track records".
We introduce products according to your specific needs!

Features
- Within our original anti-vibration control structure, accomplished a high alignment accuracy.
- Achieves Clean Class 1: the highest level of equipment cleanliness.
- TFC-6800 achieves high productivity with its double-head configuration.
- A full range of features based on extensive experience and track record in the field of advanced packaging.
Related Information
Contact Us
- Mechatronics System Division