Sputtering Equipment for
Lamp Reflector
（BM-900/PLACOAT）
Sputtering Equipment for Lamp Reflector
・Plasma processing, sputtering, polymerization by one equipment
・Better yield and productivity by line automation
Application example
-
Automobile lamp reflector
Features
- High productivity (30-45 sec or less per batch)
- Easy substrate (workpiece) mounting by deposition down
- Short time maintenance (material, shield replacement, plasma unit maintenance)
- Three-dimensional substrate can be processed.
- Better yield and productivity by line automation.
| BM-900 | PLACOAT | |
The number of process chamber (max) *1 |
3 | 3 |
Size (mm) |
W1500×D1500×H2000 | W2500×D2500×H1500 |
Substrate size (max) mm |
φ275×H150 | L500×W500×H200 |
Cycle time *2 |
30 sec or less per batch |
45 sec or less per batch |
Plasma process unit (Bombard) |
〇 | 〇 |
Sputtering chamber |
〇 | 〇 |
Plasma process unit (Polymerization) |
〇 | 〇 |
*1 Load lock chamber is excluded.
*2 Depends on sputtering conditions (substrate, material, etc.)
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