Sputtering Equipment for Electronic Components
（BM-700/900/1400）
Sputtering Equipment for Electronic Components
・Saves space and high productivity
Application example
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Electronic Device
・Inductor（Electrode Layer）
・Ceramic Device（Electrode Layer）
・Quartz Device（Electrode）
・SAW/BAW Device（Electrode Layer）
Features
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Superior Space Productivity
Unique platform saves space and achieves high productivity
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Versatile Process
7 process chambers can be selected and mounted on sputtering, heating, cooling, Plasma processing modules
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Automation
Proposing automated lines according to customer requests
Inquiries about Products
