Some of the buildings and machinery at the Toshiba Tsurumi Plant were borrowed to commence operations. At its founding, the Company was named "Shibaura Kyomachi Seisakusyo." However, in December of the same year, this was changed to "Shibaura Engineering Works," a name previously used by the predecessor of Toshiba Corporation. At its founding, the Company primarily produced munitions for the military.

The Company acquired a machine tool plant located in Ofuna, Kanagawa Prefecture, which began operations as the Ofuna Plant (current YOKOHAMA Operations), producing wireless power supplies, electric winches, electric trimmers, DC transformers, and more.

After the end of the Second World War, shifting operations from munitions for the military, which was the primary area of business, to the private sector was considered a pressing issue for maintaining and continuing the operations of the Company. Examples of ventures into new businesses include applying motors as a core technology to develop underwater and DC motors in the industrial field, as well as washing machine motors and fan motors for air conditioners in the consumer field.

The Company developed LCD panel wet cleaning equipment and expanded the wet cleaning equipment business in response to a shift to LCDs in computers. It then applied the wet cleaning technology developed in the LCD field to the semiconductor field and embarked on the development of wafer wet cleaning equipment.

The Company merged with Tokuda Seisakusho Co., Ltd., a manufacturer of chemical dry etching system and sputtering equipment used for film coating compact discs (CDs). This produced synergistic effects in the equipment business that generated even further business growth.

The Company established the overseas subsidiary Shibaura Technology International Corporation as a base for semiconductor production equipment sales and services in the U.S. This was followed by subsidiaries in Taiwan, South Korea, China, and other regions as part of a comprehensive sales and service network for customers based overseas.

The Company merged with Toshiba Mechatronics Co., Ltd., a manufacturer of die bonders and TAB mounted devices, which led to the birth of "Shibaura Mechatronics." The merger formed a single manufacturing equipment company capable of covering front-end and back-end processes for semiconductor production equipment and FPD manufacturing equipment.

A new plant building capable of producing 10th-generation substrates was constructed at YOKOHAMA Operations to meet growing demand for LCD panel manufacturing equipment and increasing sizes of LCD panels.

Sales of global niche top products^* like single-wafer Si wafer cleaning equipment and high-temperature phosphoric acid etching equipment SC300-HT series increased.