Large Batch Type Vacuum Evaporation Equipment
（CU-36P）
Large Batch Type Vacuum Evaporation Equipment
The CU-36P-180J is the large-batch type vacuum evaporation equipment developed based on the technology of the mass-production type evaporation equipment of resin parts.
Features
- Reduced exhaust time by large-sized R structure ⇒ Reduced cycle time
- Bombard, plasma polymerization and hydrophillic treatments are possible with plasma electrodes.
- Improved productivity with the biparting-door structure (allows preparing of next workpiece during processing of one door)
| Equipment type | CU-36P-180J |
|---|---|
| Vacuum chamber | ø1800×Ｈ2040mm |
| Pump | 36-inch diffusion pump×1, mechanical booster pump×2, rotary pump×2, chiller×1 |
| Vaporization electrode | 2 pairs per door, 25 kVA transformer |
| Jig, dolly | Commonly used for 6-axis (ø540 mm) and 8-axis (ø440 mm) equipment |
| Plasma electrode | 2 electrodes maximum (RF 3 kW) |
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