Sputtering Equipment for Optical Disc

Sputtering Equipment for Optical Disc

Sputtering Equipment for Optical Disc

A new concept sputtering equipment that supports Blu-ray discs and archive discs.

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Features

  • Highly uniform film thickness: ±2.0% (absolute value)
    (K-type sputter source for semi transparent layer)
  • Shot count: 1 million times or more
  • A single unit can form Si, Ag, Agx, Au and Al films
    Able to form five different films simply by replacing the target
  • High operability, high maintainability
  • Supports sputtering on CD (1.2 mm thick) ,DVD (0.6 mm thick) and BD
    without any modification to the equipment

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