Sputtering Equipment for Optical Components
CCS-1300 / 2110 / 2800
Enables Continuous Multi-Layer Formation at Low Temperatures, Optimal for Optical Film Formation
The rotational film formation method eliminates thermal damage to the package. This unit can be used to form films on the entire surface of a workpiece, making it easy to build automated production lines with outside partners.
Application Example
- AR coating for cover glass (smartphone / in-vehicle display)
- Enhanced reflection mirror for HUD
- Thin-film multilayer components
Features
- Post-oxidation, Low-temperature Film Formation
- High productivity
- Supports Variety Production
- Excellent Uniformity
- High quality
- Line automation is easy.
- Option: Film thickness monitor
Related Information
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The Division in Charge of This Product
- Mechatronics System Division