Sputtering Equipment for Electronic Components
BM-1400E / 1400W / 900E / 700E
Saves Space and High Productivity
This unit saves space thanks to its unique platform. It supports a variety of processes, and it is also possible to choose between up-sputtering and down-sputtering according to your needs.
Application Example
Electronic Device
- Inductor (Electrode Layer)
- Ceramic Device (Electrode Layer)
- Quartz Device (Electrode)
- SAW / BAW Device (Electrode Layer)
Features
Superior Space Productivity
Unique platform saves space and achieves high productivity
Versatile Process
Process chambers can be selected and mounted on sputtering, heating, cooling, Plasma processing modules
Automation
Proposing automated lines according to customer requests
Related Information
Contact Us
The Division in Charge of This Product
- Mechatronics System Division