Vacuum Equipment

Supplying Film Formation Equipment That Applies Vacuum Technology to a Versatile of Fields

We manufacture sputtering equipment for use in a wide range of fields, from R&D to mass production of electronic components, devices, optics, and automotive parts, etc.

Electronic Components

Various Devices

Research and Development

Semiconductors

Decorative Coating

Optical Components

Electronic Components

Superior Space Productivity Versatile Process Automation

Sputtering Equipment
for Electronic Components

Can be used for applications such as electrodes and wiring in electronic components.

Various Devices

Excellent Uniformity Versatile Process Automation

Multipurpose
Sputtering Equipment

Can be used for mass production of various devices.

Research and Development

Extensive Delivery Track Record Fully Automated Operation Versatile of Options

Sputtering Equipment
for Research and Development

Can be used for R&D for various devices.

Semiconductors

Supports SiC Wafers Wafer Size: 200,150,100 (mm) Small Footprint

Sputtering Equipment
for Semiconductors

Can be used for applications such as electrodes and wiring in wafer processes.

Decorative Coating

High Throughput Short Time Maintenance Small Footprint

Sputtering Equipment
for Decorative Coating

Can be used for decorative parts such as automobile interiors and exteriors.

Optical Components

Enables Multi-Layer Film Formation at Low Temperatures High Productivity Supports Variety Production

Sputtering Equipment
for Optical Components

Can be used for optical film applications such as AR coating.