Panel Spin Cleaning System
■ Compatible with Various Panel Sizes
Examples of Supported Sizes
□ 320 x 320mm, □ 510 x 515mm, □ 600 x 600mm
φ200, φ300mm
Supported processes
This spin-type wet process system is ideal for a range of acid and alkaline-based chemical processes including cleaning, development, etching, and stripping.
See here for equipment using related technologies
Features
Flexible Spin Processing System
Allows combination of various chemical treatments and cleaning tools.
Minimized Cross Contamination
Suppresses cross-contamination at a high level.
Low COO
Achieves eco-friendly cleaning by minimizing the amount of chemicals and pure water used.
Example Applications
- Glass panels (-G4.5) for smart phones, PCs, tablets, etc.
- Wafer (~12inch)
Related Information
Contact Us
The Division in Charge of This Product
- Fine Mechatronics Division