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Inquiries About Products and Services

Semiconductor Manufacturing Equipment

Fine Mechatronics Division

Semiconductor Manufacturing Equipment (Front-End Process)

  • Post-CMP Cleaning System
  • Final Cleaning System
  • Photomask Cleaning System
  • Photomask Etching System
  • Hot-H3PO4 Wet Etching System
  • Chemical Dry Etching System
  • Low-Temperature Chemical Ashing System
  • FOSB / FOUP Cleaning System

Mechatronics System Division

Semiconductor Manufacturing Equipment (Back-End Process / Others)

  • Multi-Process Bonder
  • High-End Wafer Level Package Bonder
  • Hybrid Bonder
  • Wafer Level Package Bonder
  • Panel Level Package Bonder
  • Reel-to-Reel Bonder
  • Sputtering Equipment for Semiconductors

FPD Manufacturing Equipment

Fine Mechatronics Division

FPD Manufacturing Equipment (Wet Process / Others)

  • Slice Etching Equipment
  • Developing Equipment
  • Stripping Equipment
  • Panel Spin Cleaning System

Mechatronics System Division

FPD Manufacturing Equipment (Module Process)

  • COF Bonder for Flat Panel Display (OLB)
  • IC / COF Bonder for Flat Panel Display (COG / OLB)
  • Bonder for Next-Generation Displays

Vacuum Equipment

Mechatronics System Division

  • Sputtering Equipment for Electronic Components
  • Multipurpose Sputtering Equipment
  • Sputtering Equipment for Research and Development
  • Sputtering Equipment for Semiconductors
  • Sputtering Equipment for Decorative Coating
  • Sputtering Equipment for Optical Components

Other Equipment

Fine Mechatronics Division

  • Application of Inkjet Technologies
  • Edible Ink

Mechatronics System Division

  • Automation System
  • Rechargeable Battery Manufacturing Equipment

Inquiries About Shibaura Mechatronics

Corporate Management Division

Investor Relations / Sustainability / Others

Inquiries About Group Companies

For the Group Companies, Please Contact Each Company Directly.