Wafer marker to print control numbers on silicon wafers.
Clean micro-marking minimizes dust generation in the semiconductor process.
- High speed, clean marking
- Compact design
- Easy maintenance (totally air cooled LD pumped)
- 3-, 4- and 5-inch, 5- 6- and 8-inch, 8- and 12-inch, 12-inch Foup dedicated
| Item | Remark | |
|---|---|---|
| Oscillation wavelength | 1.06µm/0.53µm | LD pumped |
| Laser output | 5W/1.6W | |
| Marking accuracy | 0.1 ～ 0.2mm | |
| Throughput | 100 to 240pcs | Wafer/h |
