In the course of our business activities, we are committed to policies of “do not use,” which aims to reduce use of resources and to keep environmental impacts to a minimal level, and “do not emit,” which aims to reduce industrial waste and CO2 emissions to as low a level as possible. Through these policies, we aim to reduce environmental impacts across our business operations, including development and production. We are committed to providing equipment that allows our customers to manufacture with many fewer inputs of energy and resources.
Recognizing that “humankind has the duty to hand on the irreplaceable global environment to the next generation in a sound state,” we seek to contribute to a sustainable society.
Environmental Management Promotion
“Promote the idea we must use fewer resources and reduce emissions in all of our business processes.”
Offering Environmentally Conscious Products
“In pursuit of fewer environmental burdens, from the development stage all the way through to disposal.”
A Socially Aware Company
“Promote CSR management in cooperation with our stakeholders.”
Shibaura Mechatronics Group is committed to “monotsukuri”, as a manufacturer that delivers total solutions extending from product development through to services. We bring together core technologies cultivated over many years in areas that include precision mechatronics, vacuums, wet cleaning, deposition, etching and bonding, and we apply this know-how to the development of manufacturing equipment for applications that range across flat panel displays, semiconductors, media devices, electronic components and optical thin film. Throughout our activities, we give full consideration to the environment and promote the provision of environmentally friendly products.
１．Promoting Environmental Management
By reducing use of the earth's resources, impactｓ on the global environment, and the volume of emissions that result from our business activities, we are promoting activities that unify the environment and management. Through this alignment we strive for continual improvement of our environmental performance, to prevent pollution, and to promote protection of the environment.
２．Providing Environmentally Conscious Products
We recognize the finite nature of the Earth's resources, and so promote their effective use and utilization. Building on this, we continue to proactively expand the provision of environmentally conscious products that have fewer environment impacts throughout their lifecycle.
３．Promoting business activities
We have defined targets for our business activities, and in all of our business processes we are working to reduce impacts on the environment in a way that helps to mitigate climate change, promote effective use of resources, and reduce the use and improve the management of chemical substances.
４．A Socially Aware Company
We act in compliance with environment-related laws, guidelines approved by the company and voluntary standards.
All company employees are committed to increasing their own levels of environmental awareness.
In promoting environmental activities across Shibaura Mechatronics Group as a whole, developing and offering excellent environmental technology and products, and in cooperating with communities and society in promoting environmental activities, we proactively engage in information disclosure and communication with the purpose of cultivating mutual understanding.
Under the Environmental Management Officer, we divide the ECP promotion system into two, product systems and business systems, each with a person responsible for its execution. At the "Group-wide Global Environmental Committee" we set the direction for the Group's approach to environmental issues, and work to promote company-wide environmental activities.
As a product-related approach, Shibaura Mechatronics Group is endeavoring to alleviate the burdens placed on the environment by offering environmentally conscious products (ECP).
With ECP, consideration is given to the environment at all stages of the product life cycle, including procurement of materials, manufacturing, transportation, use and disposal. From the product development stage on, we use three factors to evaluate environmental impacts: mitigation of climate change, the effective use of resources, and the management of chemical substances.
Products that receive particularly high evaluations receive the designation of Excellent-ECP. Shibaura Mechatronics Group is committed to delivering ECP to our customers, and through this approach we will continue to make efforts to reduce environmental impacts.
Examples of Environmentally Conscious Products：H3PO4 Single Wet Processor
Improving the environment (Mitigation of climate change)
Process consumption rate per unit function: 58% (*1)
Enhancing value (improving productivity)
Production volume per unit function: 3.2 times (*1)
Microfabrication accuracy: line width 5 nm (*1)
*1: Comparison with reference model (2011)
Description of equipment
The H3PO4 Single Wet Processor etches silicon nitride film in the semiconductor device wafer manufacturing process. It realizes a highly selective etching processing for silicon nitride film on silicon oxide film, high precision control of the etching profile, highly clean finishing processing, and savings in chemicals through the reuse of phosphoric acid.
Reduction of environmental loads
It delivers greater precision in microfabrication than standard models, and improves the rate of reduced use of process consumables. On top of this, it wins productivity improvement that cuts power consumption, and by doing so it reduces emissions of CO2 and contributes to mitigation of climate change.